- Substrate transfer
- Load locks
- Vacuum chambers
- Repeatable throughput
- Precise handling
- Reduced intervention
Description
The SIASUN SM15 Vacuum Robot transfers substrates (such as wafers) or sensitive parts between load locks, vacuum chambers, and internal stations in integrated process tools.
Supports repeatable throughput, precise handling, and reduced human intervention in semiconductor manufacturing.
The SM15 serves semiconductor, inspection, and industrial vacuum handling applications.
Contact for pricing and availability.
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