- Vacuum chambers
- Transfer modules
- Delicate substrates
- High repeatability
- Throughput focus
- Contamination control
Description
The SIASUN SM14 Vacuum Robot operates through or within vacuum chambers and vacuum-compatible transfer modules. Moves delicate substrates between process stations with high repeatability.
Key enabling technology for modern fabs and advanced vacuum-process lines where throughput and contamination control are critical.
The SM14 serves semiconductor and industrial vacuum transfer applications.
Contact for pricing and availability.
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