- Vacuum wafer transfer
- Load locks
- Process modules
- Repeatability
- Throughput
- Contamination control
Description
The SIASUN Vacuum Robot Phoenix B Series transfers wafers between load locks, transfer chambers, and process modules (deposition, etch, metrology) without breaking controlled environments.
Improves repeatability, throughput, and contamination control in semiconductor and cleanroom manufacturing.
The Phoenix B Series serves semiconductor, education, and industrial vacuum handling applications.
Contact for pricing and availability.
Features
Specs
Industries
SIASUN Vacuum Robot Phoenix B Series
- Regular price
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