- Clean robot
- Substrate handling
- Process/storage transfer
- Contamination control
- Handling risk reduction
- Advanced manufacturing
Description
The SIASUN PHOENIX-S25 Vacuum Robot is grouped within SIASUN's "clean robot" subsystems including EFEM handling and vacuum transfer platforms. Moves sensitive substrates between process and storage locations.
Minimizes contamination and handling risk for wafers or panels in semiconductor and advanced manufacturing.
The Phoenix-S25 serves semiconductor and industrial clean manufacturing applications.
Contact for pricing and availability.
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