Description

The SIASUN PHOENIX Series Vacuum Manipulator operates within a vacuum transfer module (VTM) or transfer chamber of a cluster tool. Moves substrates (commonly silicon wafers) between load locks and multiple process chambers.

Maintains stringent cleanliness, positioning accuracy, and uptime requirements as part of the front-end automation ecosystem.

The Phoenix Series serves semiconductor, logistics, research, and inspection applications.

Contact for pricing and availability.

Features

VTM operation
Transfer chamber
Silicon wafers
Process chambers
Cleanliness
Positioning accuracy

Specs

Model: Vacuum Manipulator PHOENIX Series
Robot Type: Vacuum manipulator
Target Use: VTM cluster tool
Brand: SIASUN

Industries

Industrial

SIASUN

SIASUN Vacuum Manipulator Phoenix Series

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The SIASUN PHOENIX Vacuum Manipulator operates in vacuum transfer modules and cluster tools. Silicon wafer handling with stringent cleanliness and positioning accuracy.

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SIASUN Vacuum Manipulator Phoenix Series

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SIASUN Vacuum Manipulator Phoenix Series