- Vacuum chambers
- Load-lock systems
- Cluster tools
- Wafers/panels/carriers
- Vacuum-oriented
- Air isolation
Description
The SIASUN PHOENIX-S25 Vacuum Manipulator is integrated into vacuum chambers, load-lock systems, and cluster tools. Moves parts or substrates (wafers, panels, carriers, precision components) between process modules.
Positioned as a vacuum-oriented manipulator platform without exposing materials to ambient air.
The Phoenix-S25 serves semiconductor and industrial vacuum handling applications.
Contact for pricing and availability.
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