Description

The SIASUN Blade-D156 Atmospheric Manipulator moves wafers (or wafer-like substrates) between front-end modules, load ports, aligners, inspection stations, and process tool interfaces at ambient pressure.

Positioned as a compact, precision transfer platform often part of an EFEM or integrated material handling cell.

The Blade-D156 serves semiconductor, inspection, and industrial atmospheric handling applications.

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Features

Ambient pressure
Front-end modules
Load ports/aligners
Inspection stations
Compact precision
EFEM integration

Specs

Model: Blade-D156
Robot Type: Atmospheric manipulator
Target Use: EFEM, front-end handling
Brand: SIASUN

Industries

Industrial

SIASUN

SIASUN Atmospheric Manipulator Blade D156

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The SIASUN Blade-D156 is a compact atmospheric manipulator for EFEM and front-end module integration. Precision wafer transfer at load ports, aligners, and inspection stations.

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SIASUN Atmospheric Manipulator Blade D156

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SIASUN Atmospheric Manipulator Blade D156